MOSCAP

MOSCAPs(with shadow mask)

1. Clean
2. Oxidise 1100C for 30 mins
3. Evaporate through Al foil shadow mask with holes in it made by sewing needle or pin
4. Scratch the backside(if no HF etch capabilities) - Or Put resist on top and etch the bottom(if HF etch capable)
5. (Optional) - evaporate Al for backside contact
6. Probe each capacitor in Proxima and do the CV characterisation

Some runs

moscap-2208.zip

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