{"version":1,"pages":[{"id":"qu8FMUhJctp0InwF1x5z","title":"HackerFab IITB Docs","pathname":"/","siteSpaceId":"sitesp_d7RI2","description":"Homepage"},{"id":"NVApr6CIXWa46j9F37JH","title":"litho-v1","pathname":"/tools/litho-v1","siteSpaceId":"sitesp_d7RI2","description":"A direct-write photolithography system with 5um line/space under INR 2,00,000","breadcrumbs":[{"label":"Tools"}]},{"id":"RkGFkhjLRH2jjpLQXvIU","title":"XYZ Stage","pathname":"/tools/litho-v1/xyz-stage","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"Tools"},{"label":"litho-v1"}]},{"id":"9qNCrWNFX4UPlcrWG88R","title":"sputter-v2","pathname":"/tools/sputter-v2","siteSpaceId":"sitesp_d7RI2","description":"This is the official IITB documentation for the sputter","breadcrumbs":[{"label":"Tools"}]},{"id":"nngyK8Seo9f8lG4QBImw","title":"tube-furnace","pathname":"/tools/tube-furnace","siteSpaceId":"sitesp_d7RI2","description":"This is the official HackerFab IITB documentation for the tube furnace.","breadcrumbs":[{"label":"Tools"}]},{"id":"EwpJto9DXJ9TK4zj9JuZ","title":"dopant (diy)","pathname":"/tools/dopant-diy","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"Tools"}]},{"id":"VPV78P5zVfCspZo5faPH","title":"thermal-evaporator-v1","pathname":"/tools/thermal-evaporator-v1","siteSpaceId":"sitesp_d7RI2","description":"This is the official HackerFab IITB documentation for the thermal evaporator","breadcrumbs":[{"label":"Tools"}]},{"id":"PlZ0gwHvgwyMpdYKz8VO","title":"Wafer Info","pathname":"/fab-basics/wafer-info","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"FAB BASICS"}]},{"id":"PWsLZp61x7h4BgjfRxu6","title":"Wafer Handling","pathname":"/fab-basics/wafer-handling","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"FAB BASICS"}]},{"id":"Fdkij6hllzXpn32GkdFQ","title":"Liftoff and Undercut in Deposition","pathname":"/fab-basics/liftoff-and-undercut-in-deposition","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"FAB BASICS"}]},{"id":"d45cf9H1fRQXK8birOFi","title":"Litho performance","pathname":"/fab-basics/litho-performance","siteSpaceId":"sitesp_d7RI2","description":"Resolution, Dose Matrix, Under/overdevelopment, characterization techniques","breadcrumbs":[{"label":"FAB BASICS"}]},{"id":"WHAgdRDCM4yhEeMMqARK","title":"MOSCAP","pathname":"/processes/moscap","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"Processes"}]},{"id":"oOt2RgWVEM0sUvMNFC8C","title":"Diode","pathname":"/processes/diode","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"Processes"}]},{"id":"1vMd14Ta0UVVNg24WvRa","title":"Liftoff","pathname":"/processes/liftoff","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"Processes"}]},{"id":"iXkBo0tVHDoAeh2uQ4pA","title":"NMOS","pathname":"/processes/nmos","siteSpaceId":"sitesp_d7RI2","description":"","breadcrumbs":[{"label":"Processes"}]},{"id":"iL8tVfj3VCGRclLhZjiH","title":"Doping","pathname":"/processes/doping","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"Processes"}]},{"id":"A7hhk446r7qyCDyYAVhi","title":"HackerFab Universe","pathname":"/hackerfab-universe","siteSpaceId":"sitesp_d7RI2"},{"id":"EA7zc3ngmXEk11Lp1YvE","title":"Runs","pathname":"/runs","siteSpaceId":"sitesp_d7RI2","description":"A timeline of runs on our tools, with data, images and results"},{"id":"N9OulsPijlCocQIaRPho","title":"2026-07-07 furnace ellipso","pathname":"/runs/2026-07-07-furnace-ellipso","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"Runs"}]},{"id":"EXH0EyuWlavcZTe3JqmW","title":"2026-07-07 sputter profilo","pathname":"/runs/2026-07-07-sputter-profilo","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"Runs"}]},{"id":"LLTYmvg90cLkBXNsnvOF","title":"USAF resolution test","pathname":"/runs/usaf-resolution-test","siteSpaceId":"sitesp_d7RI2","breadcrumbs":[{"label":"Runs"}]}]}